At Mapper, I worked on a wide range of projects within various multidisciplinary teams. As a senior mechanical designer, I am responsible for translating theoretical designs into actual hardware and validating that hardware based on defined requirements. These designs are used both in the lithography tool itself and in experimental setups and tooling. I also take on a supervisory and coordinating role for other designers within the team.

Example projects include:

Clamp Tower Team
Design and verification of the modular “Clamp Tower System,” a frame consisting of a rigid platform and sheet metal structure built to high tolerance requirements. These were based on system tolerance analyses and verified using a large-range FARO measuring arm. The frame provides various facility services (vacuum, UPW, cooling water, gases, power, and network) to integrated modules, such as the wafer/wafertable handling robot, Wafer Transfer Station, and Wafertable Cassette Loader Station. The system is designed with fast servicing and module exchange in mind to minimize downtime. The team worked using an Agile/Scrum development methodology.

Contamination Control Team
Design of an in-vacuum plasma module used for in-situ cleaning of apertures within the electro-optical column. The module was designed with stringent thermal requirements and minimal vibration contribution. Using thermo-mechanical analysis in Ansys, I developed a cooling circuit by casting titanium tubes into an aluminum housing, which encloses the quartz reaction chamber. To transport highly reactive molecules to their target, I created a design using 3D printing that met both thermal and mechanical specifications.

Beam Measurement Team
Design of a high-stiffness XYRxRyRz suspension for a camera/lens system, flexible in Z, using a diaphragm flexure leaf spring structure. Actuation was achieved with an electric motor and a spindle/gear transmission.
Additionally, I designed an in-vacuum Faraday cup module for electron beam current verification.